Photodetector for backside-illuminated sensor

Active solid-state devices (e.g. – transistors – solid-state diode – Responsive to non-electrical signal – Electromagnetic or particle radiation

Reexamination Certificate

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Reexamination Certificate

active

07939903

ABSTRACT:
A backside-illuminated sensor including a semiconductor substrate. The semiconductor substrate has a front surface and a back surface. A plurality of pixels are formed on the front surface of the semiconductor substrate. At least one pixel includes a photogate structure. The photogate structure has a metal gate that includes a reflective layer.

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Chinese Office Action issued Mar. 20, 2009, Application No. 2007101487965, 4 pages.

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