Radiant energy – Inspection of solids or liquids by charged particles – Electron microscope type
Reexamination Certificate
2011-03-08
2011-03-08
Vanore, David A (Department: 2881)
Radiant energy
Inspection of solids or liquids by charged particles
Electron microscope type
C250S310000, C250S3960ML, C250S3960ML
Reexamination Certificate
active
07902506
ABSTRACT:
A phase-shifting element for shifting a phase of at least a portion of a particle beam is described, as well as a article beam device having a phase-shifting element of this type. In the phase-shifting element and the particle beam device having a phase-shifting element, components shadowing the particle beam are avoided, so that proper information content is achieved and in which the phase contrast is essentially spatial frequency-independent. The phase-shifting element may have at least one means for generating a non-homogeneous or anisotropic potential. The particle beam device according to the system described herein may be provided with the phase-shifting element.
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Barton Bastian
Benner Gerd
Rose Harald
Schröder Rasmus
Carl Zeiss NTS GmbH
Max-Planck-Gesellschaft zur Forderung der Wissenschaften e.v.
Muirhead and Saturnelli LLC
Vanore David A
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