Phase plate, imaging method, and electron microscope

Details Phase plate, imaging method, and electron microscope Phase plate, imaging method, and electron microscope

2011-04-19

2011-04-19

Johnston, Phillip A (Department: 2881)

Radiant energy

Inspection of solids or liquids by charged particles

Methods

C250S311000, C378S043000

Reexamination Certificate

active

07928379

ABSTRACT:
The invention concerns a phase plate for electron optical imaging, wherein the zero beam (4) is phase-shifted in order to obtain an image with optimum contrast through interference with the diffracted electron beams (5, 5′). The shading of diffracted electron beams (5, 5′) is kept to a minimum and shading that cannot be reconstructed from the obtained image data is prevented. This is achieved in that the electrode (1′) is designed as a shielded conductor (7), which is disposed to extend from a mounting (8) in a substantially radial direction towards the area of the zero beam (4), wherein the shielded conductor (7) has an end (9) in front of the area of the zero beam (4) such that a field (6) is formed between the conductor (7) and the shielding (10) surrounding it, which overlaps this area. The invention also concerns an imaging method for complete reconstruction of the image and an electron microscope (12) which is provided with the phase plate (1).

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Matsumoto et al. “The phase constancy of electron waves traveling through Boersch's electrostatic phase plate”. Ultramicroscopy, Amsterdam, NL vol. 63, No. 1, Apr. 1996, pp. 5-10.
Matsumoto et al. “The phase constancy of electron waves traveling through Boersch's electrostatic phase plate”. Ultramicroscopy, Amsterdam, NL vol. 63, Nr. 1, Apr. 1996, Pa. 5-10.
Ludwig Reimer “Transmission Electron Microscopy”. Physics of Image Formation and Microanalysis Springer-Verlag, Berlin, Heidelberg, New York, Tokyo 1984 p. 199 and following.

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