4. Radiant energy
  5. Inspection of solids or liquids by charged particles
  6. Methods

CEOS Corrected Electron Optical Systems GmbH

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Corrective for eliminating the third-order aperture...

Radiant energy – With charged particle beam deflection or focussing – Magnetic lens
Reexamination Certificate

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Corrector for axial and off-axial beam paths

Radiant energy – Inspection of solids or liquids by charged particles – Electron microscope type
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Electron-optical lens arrangement with an axis that can be...

Radiant energy – With charged particle beam deflection or focussing – With target means
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Electron/ion gun for electron or ion beams with high...

Radiant energy – Electron energy analysis
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Electrostatic corrector

Optical: systems and elements – Lens
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Profile ID: LFUS-PAI-P-2246617

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