Permeable capacitor electrode

Details Permeable capacitor electrode Permeable capacitor electrode

2007-02-20

2007-02-20

Sarkar, Asok K. (Department: 2891)

Semiconductor device manufacturing: process

Making field effect device having pair of active regions...

Having insulated gate

C438S396000, C438S239000, C438S257000, C438S972000, C257SE29010, C257SE27155

Reexamination Certificate

active

10875534

ABSTRACT:
The present teachings describe a container capacitor that utilizes an etchant permeable lower electrode for the formation of single or double-sided capacitors without excessive etching back of the periphery of the use of sacrificial spacers. The present teachings further describe a method of forming at least one capacitor structure on a substrate. For example, the method comprises forming at least one recess in the substrate, depositing a first conductive layer on the substrate so as to overlie the at least one recess, and defining at least one lower electrode within the at least one recess formed in the substrate by removing at least a portion of the first conductive layer. The method further comprises diffusing an etchant through the at least one lower electrode so as to remove at least a portion of the substrate to thereby at least partially isolate the at least one lower electrode. The method still further comprises depositing a dielectric layer on the at least one isolated lower electrode and depositing a second conductive layer on the dielectric layer so as to form an upper electrode.

REFERENCES:
patent: 4430564 (1984-02-01), Fischer
patent: 5480820 (1996-01-01), Roth et al.
patent: 6049101 (2000-04-01), Graettinger et al.
patent: 6146961 (2000-11-01), Graettinger et al.
patent: 6664158 (2003-12-01), Dehm et al.
patent: 6784067 (2004-08-01), Suzuki
patent: 2003/0068858 (2003-04-01), Allman et al.
patent: 2004/0171208 (2004-09-01), Gilton

Affiliated with

Also associated with

Rating

Permeable capacitor electrode does not yet have a rating. At this time, there are no reviews or comments for this patent.

If you have personal experience with Permeable capacitor electrode, we encourage you to share that experience with our LandOfFree.com community. Your opinion is very important and Permeable capacitor electrode will most certainly appreciate the feedback.

Rate now

Comments { 0 }

Profile ID: LFUS-PAI-O-3872848