Adhesive bonding and miscellaneous chemical manufacture – Differential fluid etching apparatus – With workpiece support
Reexamination Certificate
2007-08-07
2007-08-07
Hassanzadeh, Parviz (Department: 1763)
Adhesive bonding and miscellaneous chemical manufacture
Differential fluid etching apparatus
With workpiece support
C118S728000, C118S729000, C118S730000, C156S345520, C156S345530, C156S345540, C156S345550
Reexamination Certificate
active
10819891
ABSTRACT:
Generally, a substrate support member for supporting a substrate is provided. In one embodiment, a substrate support member for supporting a substrate includes a body coupled to a lower shield. The body has an upper surface adapted to support the substrate and a lower surface. The lower shield has a center portion and a lip. The lip is disposed radially outward of the body and projects towards a plane defined by the first surface. The lip is disposed in a spaced-apart relation from the body. The lower shield is adapted to interface with an upper shield disposed in a processing chamber to define a labyrinth gap that substantially prevents plasma from migrating below the member. The lower shield, in another embodiment, provides the plasma with a short RF ground return path.
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Brown Karl
Lau Allen
Mehta Vineet
Phan See-Eng
Sherstinsky Semyon
Dhingra Rakesh
Hassanzadeh Parviz
Patterson & Sheridan LLP
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