4. Coating apparatus
  5. Gas or vapor deposition

George Kamian

Inventor

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Injector and method for delivering gaseous chemicals to a surfac

Coating apparatus – Gas or vapor deposition
Patent

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Method of semiconductor wafer heating to prevent bowing

Heating – Processes of heating or heater operation – Including preparing or arranging work for heating
Reexamination Certificate

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Pedestal heat transfer and temperature control

Electric resistance heating devices – Heating devices – Radiant heater
Reexamination Certificate

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Profile ID: LFUS-PAI-P-554316

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