Pattern measuring method

Details Pattern measuring method Pattern measuring method

2007-02-20

2007-02-20

Nguyen, Kiet T. (Department: 2881)

Radiant energy

Inspection of solids or liquids by charged particles

Electron probe type

Reexamination Certificate

active

11066219

ABSTRACT:
A pattern measuring method calculates an average pattern shape from a plurality of the same patterns appearing within an image captured using an electron microscope, and compares pattern information at each measuring position with average pattern information to determine roughness.

REFERENCES:
patent: 6839470 (2005-01-01), Ikeda
patent: 7049589 (2006-05-01), Yamaguchi et al.
patent: 7053371 (2006-05-01), Ojima et al.
patent: 2005/0205780 (2005-09-01), Nakagaki et al.
patent: 2003-037139 (2003-02-01), None

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