4. Image analysis
  5. Pattern recognition
  6. Feature extraction

Osamu Komuro

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Charged particle beam system

Radiant energy – Inspection of solids or liquids by charged particles – Electron probe type
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Electron microscope

Radiant energy – Inspection of solids or liquids by charged particles – Electron microscope type
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High-accuracy pattern shape evaluating method and apparatus

Optics: measuring and testing – Shape or surface configuration – Triangulation
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High-accuracy pattern shape evaluating method and apparatus

Optics: measuring and testing – Shape or surface configuration – Triangulation
Reexamination Certificate

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High-accuracy pattern shape evaluating method and apparatus

Optics: measuring and testing – Shape or surface configuration – Triangulation
Reexamination Certificate

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Profile ID: LFUS-PAI-P-2396979

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