4. Image analysis
  5. Applications
  6. Manufacturing or product inspection

Takumichi Sutani

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Dimension measuring SEM system, method of evaluating shape...

Radiant energy – Inspection of solids or liquids by charged particles – Electron probe type
Reexamination Certificate

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Focus monitoring method, exposure apparatus, and exposure mask

Computer-aided design and analysis of circuits and semiconductor – Nanotechnology related integrated circuit design
Reexamination Certificate

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Method and apparatus for arranging recipe of scanning...

Radiant energy – Inspection of solids or liquids by charged particles – Electron probe type
Reexamination Certificate

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Method and apparatus for arranging recipe of scanning...

Radiant energy – Inspection of solids or liquids by charged particles – Electron probe type
Reexamination Certificate

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Method and apparatus for inspecting defect of pattern formed...

Image analysis – Applications – Manufacturing or product inspection
Reexamination Certificate

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Profile ID: LFUS-PAI-P-2261330

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