Radiant energy – Inspection of solids or liquids by charged particles – Electron probe type
Reexamination Certificate
2007-02-08
2010-06-08
Berman, Jack I (Department: 2881)
Radiant energy
Inspection of solids or liquids by charged particles
Electron probe type
C250S491100, C250S492100, C250S492200, C250S492300, C250S306000, C250S307000, C250S309000, C250S311000
Reexamination Certificate
active
07732763
ABSTRACT:
A pattern inspection method includes: irradiating a first region of a surface of a sample having a pattern to be inspected with a charged particle beam; acquiring a first two-dimensional image showing a state of the surface of the sample; searching for a pattern similar to a previously prepared reference image within the first two-dimensional image; when the pattern similar to the reference image is not detected in the first two-dimensional image, irradiating a second region of the surface of the sample that has not been irradiated with a charged particle beam; acquiring a second two-dimensional image showing a state of the surface of the sample; and searching a pattern similar to the reference image within the second two-dimensional image.
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Berman Jack I
Finnegan Henderson Farabow Garrett & Dunner L.L.P.
Ippolito Rausch Nicole
Kabushiki Kaisha Toshiba
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