Error detection/correction and fault detection/recovery – Pulse or data error handling – Digital logic testing
Reexamination Certificate
2000-11-21
2003-07-29
Ton, David (Department: 2133)
Error detection/correction and fault detection/recovery
Pulse or data error handling
Digital logic testing
C714S738000, C714S718000
Reexamination Certificate
active
06601204
ABSTRACT:
BACKGROUND OF THE INVENTION
The present invention relates to a memory tester for testing memories formed, for example, by semiconductor integrated circuits and, more particularly, to a pattern generating method for use in testing memories of the type that respond to a start address to generate burst addresses and hence permits fast write and read. The invention pertains as well to a pattern generator using the pattern generating method, and a memory tester using the pattern generator.
FIG. 6
 illustrates in block form the general configuration of an IC tester. Reference character TES denotes generally the IC tester. The IC tester TES comprises a main controller 
111
, a pattern generator 
112
, a timing generator 
113
, a waveform formatter 
114
, a logic comparator 
115
, a driver 
116
, an analog comparator 
117
, a failure analysis memory 
118
, a logical amplitude reference voltage source 
121
, a comparison reference voltage source 
122
 and a device power source 
123
.
The main controller 
111
 is formed, in general, by a computer system and operates under the control of a test program prepared by a user, controlling the pattern generator 
112
 and the timing generator 
113
. The pattern generator 
112
 generates test pattern data DT, which is converted by the waveform formatter 
114
 to a test pattern signal of a waveform that meets specifications of a memory under test 
119
. The test pattern signal is provided to the driver 
116
 wherein It is voltage-amplified to a waveform having an amplitude value set in the logical amplitude reference voltage source 
121
. The test pattern signal thus voltage-amplified is then applied to the memory under test 
119
 for storage therein.
A response signal read out of the memory under test 
119
 is compared by the analog comparator 
117
 with a reference voltage fed from the reference voltage source 
122
 to decide whether the response signal has a predetermined logic level (voltage of a logic “H” or “L”). The response signal decided to be at the predetermined logic level is compared by the logic comparator 
115
 with expectation data EXP provided from the pattern generator 
112
. If a mismatch is found between the response signal and the expectation data EXP, it is decided that memory cell of the address from which the response signal was read out is failing, and upon each occurrence of such a failure, the faulty address is stored in the failure analysis memory 
118
 for use in deciding, after completion of the test, whether the failed cell is repairable.
FIG. 7
 which is drafted by the present inventor, illustrates in block form the internal configuration of the pattern generator 
112
 which employs, for example, the expectation data generating method disclosed in Japanese Patent Application Laid-Open Gazette 08-036035 (Laid Open Feb. 6, 1996). The pattern generator 
112
 comprises: a program memory 
11
 in which there are stored microprograms for pattern generation use; a read address generating part 
12
 which determines an address for reading out the program memory 
11
; an address data generating part 
13
 which generates address data for input to the memory under test 
119
; a mask data generating part 
15
 which generates mask data MD for bitwise masking of test pattern data to be written into the memory under test 
119
; a pattern data generating part 
15
 which generates pattern data TP; an expectation data generating part 
16
 which generates from the pattern data TP and the mask data MD the expectation data EXP to be supplied to the logic comparator 
115
; and a multiplexer 
17
 which selects and outputs one of the pattern data TP from the pattern data generating part 
15
 and the expectation data EXP from the expectation data generating part 
16
.
Incidentally, the output from the multiplexer 
17
 will be identified by DT in the 
FIG. 7
 example and the following description. Accordingly, DT is the pattern data DT at the write timing of the memory under test 
119
 and the expectation data EXP at the read timing.
The read address generating part 
12
 is composed of a program counter PC and a arithmetic logic unit ALU. The read address of the program memory 
11
 indicated by the program counter PC is subjected to an arithmetic operation, such as an addition or subtraction, based on an operation control instruction PC-C containing an operation value and written in the microprogram which is read out of the program memory 
11
 for the next test cycle, and the operation result is used to update the value of the program counter PC.
The address data generating part 
13
, the mask data generating part 
14
 and the pattern data generating part 
1
5
are each composed of an arithmetic logic unit ALU and a register RG. The values indicated by the registers RG, from which they are output as the address data XB, the mask data MD and the pattern data TP, respectively, are subjected to an arithmetic operation, such as an addition or subtraction, based on operation control instructions XB-C, MD-C and TP-C containing operation values and written in the microprograms which are read out of the program memory 
11
 for the next test cycle, and the operation results are used to update the values of the registers RG.
The address data XB and the pattern data TP are each converted by the waveform formatter 
114
 to a signal of a waveform that meets the specifications of the memory under test 
119
. Read/write control instruction R/W for the memory under test 
119
 is read out directly from the program memory 
11
, and is similarly converted by the waveform formatter 
114
 to a signal of a waveform that fulfills the specification of the memory under test 
119
, thereafter being input thereto.
Now, a description will be given of the mask data MD that is generated in the mask data generating part 
14
. Some memory devices have a bit-wise masked write function that inhibits a write for each bit of write data. In the testing of such a memory, the expectation data generating part 
16
 is required to generate expectation data EXP that has, at bit positions currently masked with the mask data MD, the same bit data as that written previously but has currently written bit data at currently unmasked bit positions.
The expectation data generating part 
16
 is specifically designed to satisfy the required with ease. That is, the expectation data generating part 
16
 is made up of a logic inverter INV and an exclusive OR circuit EOR. The mask data MD is provided via the logic inverter INV to the one input terminal of the exclusive OR circuit EOR, and the pattern data TP from the pattern data generating part 
15
 is fed to the other input terminal of exclusive OR circuit EOR. The exclusive OR circuit EOR outputs exclusive ORs of corresponding bits of the two pieces of input data.
In the case of effecting a write in the memory under test 
119
 while masking with the mask data MD and reading out the results of the data written from the memory 
119
, the multiplexer 
17
 selects and outputs expectation data EXP generated in the expectation data generating part 
16
 by the inversion of a control signal EXP-S to, for example, a logic “1”. This expectation data EXP is provided to the logic comparator 
115
.
In the mask data MD the mask bit (a write inhibit bit) has a logic “0” and the non-mask bit (a write enable bit) has a logic “1”. Those bits of the mask data MD given the logic “0” are each inverted to “1” by the inverter INV in the expectation data generating part 
16
, and function as a signal for logic inversion of the corresponding bit in the pattern data TP. On the other hand, those bits given the logic “1” are each inverted to “0” by the inverter INV in the expectation data generating part 
16
, allowing the corresponding bit in the pattern data TP to be output intact at the logical level of its own. That is, in the expectation data generating part 
16
 the pattern data TP undergoes logic inversion at the bit positions corresponding to the mask bits of the mask data MD, thereafter being provided as the expectation data EXP.
In the case of writing “0s” in all
Advantest Corporation
Gallagher & Lathrop
Lathrop, Esq. David N.
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