Particulate-free epitaxial process

Details Particulate-free epitaxial process Particulate-free epitaxial process

1985-05-20

1988-03-01

Straub, Gary P.

Adhesive bonding and miscellaneous chemical manufacture

Delaminating processes adapted for specified product

Delaminating in preparation for post processing recycling step

156613, 156DIG73, 134 1, 361212, 427 55, 4272551, 437173, 437225, C30B 2306, C30B 2510, B08B 312, B32B 302

Patent

active

047283890

ABSTRACT:
Particles and particle-generated defects during epitaxial deposition are substantially decreased by the process of controlling the various particle transport mechanisms, such as, for example, by applying low level radiant energy during cold purge cycles in barrel reactors.

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