Particle optical device with magnet assembly

Details Particle optical device with magnet assembly Particle optical device with magnet assembly

2009-12-22

2011-11-22

Souw, Bernard E (Department: 2881)

Radiant energy

Inspection of solids or liquids by charged particles

Positive ion probe or microscope type

C250S310000, C250S311000, C250S3960ML, C335S210000

Reexamination Certificate

active

08063364

ABSTRACT:
A particle optical apparatus has a particle source for generating at least one beam of charged particles, and a magnet arrangement having two pole plates, which are arranged spaced apart from one another, such that the at least one beam of charged particles in operation passes through the pole plates, wherein trenches are provided in the pole plates, in which trenches coil wires are arranged. The trenches, when viewed in a cross section transverse to an extension direction of the trenches, have a smaller width in a region of a surface of the pole plates, than in a region arranged at a distance from the surface.

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