Radiant energy – Inspection of solids or liquids by charged particles – Analyte supports
Patent
1990-06-18
1991-06-25
Berman, Jack I.
Radiant energy
Inspection of solids or liquids by charged particles
Analyte supports
2504401, 2504421, H01J 3718
Patent
active
050269950
ABSTRACT:
In a particle beam surface analyzer, having a partition wall separation a vacuum space, an opening that is provided in a partition wall through which the particle beam is taken out, a seal member which is moved along a seal surface of the seal member and seals the opening, a condenser lens which converges the particle beam onto the sample, and detector for detecting a physical quantity from the sample when the particle beam is irradiated on the sample, the surface analyzer further has a movable shift member that pushes one side surface of the seal member along the seal surface of the seal member and a stopping member which the other side surface of the seal member having a predetermined angle being larger than 55.degree. and smaller than 75.degree. to the seal surface is abutted so as to move the seal member along the other side surface till the seal member reaches the openings, whereby resultant forces between the seal member and the seal surface in the side of the one side surface is equal to that in the side of the other side surface. As the predetermined angle is larger than 55.degree. and smaller than 75.degree. to the seal surface, the abrasion and seizure of the seal member are prevented and the contamination of the sample is lessened.
REFERENCES:
patent: 2508317 (1950-05-01), Verhoeff
patent: 4020353 (1977-04-01), Saito et al.
patent: 4066905 (1978-01-01), Dassler et al.
Hazaki Eiichi
Otaka Tadashi
Shimizu Minoru
Berman Jack I.
Hitachi , Ltd.
Nguyen Kiet T.
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