Radiant energy – Inspection of solids or liquids by charged particles – Methods
Patent
1994-01-21
1995-12-19
Anderson, Bruce C.
Radiant energy
Inspection of solids or liquids by charged particles
Methods
250310, H01J 3729
Patent
active
054770491
ABSTRACT:
Using a scanning type electron microscope, a spot where a particle is detected is determined by acquiring the evaluation of detection of particles on the surface of a wafer, etc., based on the coordinate information of a particle spot, by particle detection equipment, from the image within the view, shifting the view from the most probable spot of particle existence to less probable spots in sequence, and manipulating evaluation of detection as follows; supposing that the variance of histogram of the image is .sigma., and that the value N is equal to or more than 3, which is empirically known, and assuming that the spots where the data out of the range of .+-.N.sigma. exist is that of particles detected, pixels of particles are counted. In this manipulation, weighting corresponding to the spot of histogram and weighting corresponding to the mean of intensity of detection at the neighborhood of particles are executed.
REFERENCES:
patent: 4020343 (1977-04-01), Shimaya et al.
patent: 4814829 (1989-03-01), Kosugi et al.
patent: 5231287 (1993-07-01), Sekine et al.
Anderson Bruce C.
Seiko Instruments Inc.
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