Abrading – Precision device or process - or with condition responsive... – Computer controlled
Reexamination Certificate
2006-11-21
2006-11-21
Thomas, David B. (Department: 3723)
Abrading
Precision device or process - or with condition responsive...
Computer controlled
C451S533000, C204S22400M, C205S672000
Reexamination Certificate
active
07137868
ABSTRACT:
Embodiments of a pad assembly for processing a substrate are provided. The pad assembly includes a processing layer having a working surface adapted to process a substrate, a lower layer coupled to and disposed below the processing layer, and an electrode having an upper surface disposed above the lower layer and below the working surface of the processing layer. The upper surface of the electrode is at least partially exposed to the working surface to provide an electrolyte pathway between the upper surface of the electrode and the working surface.
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Chang Shou-Sung
Chen Liang-Yuh
Duboust Alain
Olgado Donald J. K.
Tsai Stan D.
Applied Materials Inc.
Patterson and Sheridan
Thomas David B.
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