Abrading – Precision device or process - or with condition responsive... – Computer controlled
Reexamination Certificate
2007-10-23
2007-10-23
Thomas, David B (Department: 3723)
Abrading
Precision device or process - or with condition responsive...
Computer controlled
C451S533000, C204S22400M, C205S672000
Reexamination Certificate
active
11562320
ABSTRACT:
Embodiments of a pad assembly for processing a substrate are provided. The pad assembly includes a processing layer having a working surface adapted to process a substrate, a lower layer coupled to and disposed below the processing layer, and an electrode having an upper surface disposed above the lower layer and below the working surface of the processing layer. The upper surface of the electrode is at least partially exposed to the working surface by a plurality of apertures to provide an electrolyte pathway between the upper surface of the electrode and the working surface of the pad assembly.
REFERENCES:
patent: 1601642 (1926-09-01), Parker
patent: 1927162 (1933-09-01), Fiedler et al.
patent: 2112691 (1938-03-01), Crowder
patent: 2240265 (1941-04-01), Nachtman
patent: 2392687 (1946-01-01), Nachtman
patent: 2431065 (1947-11-01), Miller
patent: 2451341 (1948-10-01), Jemstedt
patent: 2453481 (1948-11-01), Wilson
patent: 2454935 (1948-11-01), Miller
patent: 2456185 (1948-12-01), Grube
patent: 2457510 (1948-12-01), van Omum
patent: 2458676 (1949-01-01), Brenner et al.
patent: 2461556 (1949-02-01), Lorig
patent: 2473290 (1949-06-01), Millard
patent: 2477808 (1949-08-01), Jones
patent: 2479323 (1949-08-01), Davis
patent: 2480022 (1949-08-01), Hogaboom
patent: 2490055 (1949-12-01), Hoff
patent: 2495695 (1950-01-01), Camin et al.
patent: 2500205 (1950-03-01), Schaefer
patent: 2500206 (1950-03-01), Schaefer et al.
patent: 2503863 (1950-04-01), Bart
patent: 2506794 (1950-05-01), Kennedy et al.
patent: 2509304 (1950-05-01), Klein
patent: 2512328 (1950-06-01), Hays
patent: 2517907 (1950-08-01), Mikulas
patent: 2519945 (1950-08-01), Twele et al.
patent: 2530677 (1950-11-01), Berkenkotter et al.
patent: 2535966 (1950-12-01), Teplitz
patent: 2536912 (1951-01-01), Cobertt
patent: 2539898 (1951-01-01), Davis
patent: 2540175 (1951-02-01), Rosenqvist
patent: 2544510 (1951-03-01), Prahl
patent: 2549678 (1951-04-01), Fiandt
patent: 2554943 (1951-05-01), Farmer
patent: 2556017 (1951-06-01), Vonada
patent: 2560534 (1951-07-01), Adler
patent: 2560966 (1951-07-01), Lee
patent: 2569577 (1951-10-01), Reading
patent: 2569578 (1951-10-01), Rieger
patent: 2571709 (1951-10-01), Gray
patent: 2576074 (1951-11-01), Nachtman
patent: 2587630 (1952-03-01), Konrad et al.
patent: 2619454 (1952-11-01), Zapponi
patent: 2633452 (1953-03-01), Hogaboom, Jr. et al.
patent: 2646398 (1953-07-01), Henderson
patent: 2656283 (1953-10-01), Fink et al.
patent: 2656284 (1953-10-01), Toulmin
patent: 2657177 (1953-10-01), Rendel
patent: 2657457 (1953-11-01), Toulmin
patent: 2673836 (1954-03-01), Vonada
patent: 2674550 (1954-04-01), Dunlevy et al.
patent: 2675348 (1954-04-01), Greenspan
patent: 2680710 (1954-06-01), Kenmore et al.
patent: 2684939 (1954-07-01), Geese
patent: 2696859 (1954-08-01), Gray et al.
patent: 2689215 (1954-09-01), Bart
patent: 2695269 (1954-11-01), de Witz et al.
patent: 2698832 (1955-01-01), Swanson
patent: 2706173 (1955-04-01), Wells et al.
patent: 2706175 (1955-04-01), Licharz
patent: 2708445 (1955-05-01), Manson et al.
patent: 2710834 (1955-06-01), Vrilakas
patent: 2711993 (1955-06-01), Lyon
patent: 3162588 (1964-12-01), Bell
patent: 3334041 (1967-08-01), Dyer et al.
patent: 3433730 (1969-03-01), Kennedy et al.
patent: 3448023 (1969-06-01), Bell
patent: 3476677 (1969-11-01), Corley et al.
patent: 3607707 (1971-09-01), Chenevier
patent: 3873512 (1975-03-01), Latanision
patent: 3942959 (1976-03-01), Markoo et al.
patent: 3992178 (1976-11-01), Markoo et al.
patent: 4047902 (1977-09-01), Wiand
patent: 4082638 (1978-04-01), Jumer
patent: 4119515 (1978-10-01), Costakis
patent: 4125444 (1978-11-01), Inoue
patent: 4199902 (1980-04-01), Sutherland
patent: 4312716 (1982-01-01), Maschler et al.
patent: 4523411 (1985-06-01), Freerks
patent: 4704511 (1987-11-01), Miyano
patent: 4713149 (1987-12-01), Hoshino
patent: 4752371 (1988-06-01), Kreisel et al.
patent: 4772361 (1988-09-01), Dorsett et al.
patent: 4793895 (1988-12-01), Kaanta et al.
patent: 4839993 (1989-06-01), Masuko et al.
patent: 4934102 (1990-06-01), Leach et al.
patent: 4954141 (1990-09-01), Takiyama et al.
patent: 4956056 (1990-09-01), Zubatova et al.
patent: 5011510 (1991-04-01), Hayakawa et al.
patent: 5061294 (1991-10-01), Harmer et al.
patent: 5066370 (1991-11-01), Andreshak et al.
patent: 5096550 (1992-03-01), Mayer et al.
patent: 5108463 (1992-04-01), Buchanan
patent: 5136817 (1992-08-01), Tabata et al.
patent: 5137542 (1992-08-01), Buchanan et al.
patent: 5203884 (1993-04-01), Buchanan et al.
patent: 5217586 (1993-06-01), Datta et al.
patent: 5225034 (1993-07-01), Yu et al.
patent: 5257478 (1993-11-01), Hyde et al.
patent: 5328716 (1994-07-01), Buchanan
patent: 5478435 (1995-12-01), Murphy et al.
patent: 5534106 (1996-07-01), Cote et al.
patent: 5543032 (1996-08-01), Datta et al.
patent: 5560753 (1996-10-01), Schnabel et al.
patent: 5562529 (1996-10-01), Kishii et al.
patent: 5567300 (1996-10-01), Datta et al.
patent: 5575706 (1996-11-01), Tsai et al.
patent: 5578362 (1996-11-01), Reinhardt et al.
patent: 5624300 (1997-04-01), Kishii et al.
patent: 5633068 (1997-05-01), Ryoke et al.
patent: 5654078 (1997-08-01), Ferronato
patent: 5674122 (1997-10-01), Krece
patent: 5702811 (1997-12-01), Ho et al.
patent: 5738574 (1998-04-01), Tolles et al.
patent: 5804507 (1998-09-01), Perlov et al.
patent: 5807165 (1998-09-01), Uzoh et al.
patent: 5823854 (1998-10-01), Chen
patent: 5840190 (1998-11-01), Scholander et al.
patent: 5840629 (1998-11-01), Carpio
patent: 5846882 (1998-12-01), Birang
patent: 5871392 (1999-02-01), Meikle et al.
patent: 5882491 (1999-03-01), Wardle
patent: 5893796 (1999-04-01), Birang et al.
patent: 5911619 (1999-06-01), Uzoh et al.
patent: 5938801 (1999-08-01), Robinson
patent: 5948697 (1999-09-01), Hata
patent: 5985093 (1999-11-01), Chen
patent: 6001008 (1999-12-01), Fujimori et al.
patent: 6004880 (1999-12-01), Liu et al.
patent: 6017265 (2000-01-01), Cook et al.
patent: 6020264 (2000-02-01), Lustig et al.
patent: 6024630 (2000-02-01), Shendon et al.
patent: 6033293 (2000-03-01), Crevasse et al.
patent: 6056851 (2000-05-01), Hsieh et al.
patent: 6066030 (2000-05-01), Uzoh
patent: 6074284 (2000-06-01), Tani et al.
patent: 6077337 (2000-06-01), Lee
patent: 6090239 (2000-07-01), Liu et al.
patent: 6103096 (2000-08-01), Datta et al.
patent: 6116998 (2000-09-01), Damgaard et al.
patent: 6132292 (2000-10-01), Kubo
patent: 6153043 (2000-11-01), Edelstein et al.
patent: 6156124 (2000-12-01), Tobin
patent: 6159079 (2000-12-01), Zuniga et al.
patent: 6171467 (2001-01-01), Weihs et al.
patent: 6176992 (2001-01-01), Talieh
patent: 6176998 (2001-01-01), Wardle et al.
patent: 6183354 (2001-02-01), Zuniga et al.
patent: 6190494 (2001-02-01), Dow
patent: 6210257 (2001-04-01), Carlson
patent: 6234870 (2001-05-01), Uzoh et al.
patent: 6238271 (2001-05-01), Cesna
patent: 6238592 (2001-05-01), Hardy et al.
patent: 6244935 (2001-06-01), Birang et al.
patent: 6248222 (2001-06-01), Wang
patent: 6251235 (2001-06-01), Talieh et al.
patent: 6257953 (2001-07-01), Gitis et al.
patent: 6258223 (2001-07-01), Cheung et al.
patent: 6261168 (2001-07-01), Jensen et al.
patent: 6261959 (2001-07-01), Travis et al.
patent: 6273798 (2001-08-01), Berman
patent: 6296557 (2001-10-01), Walker
patent: 6297159 (2001-10-01), Paton
patent: 6319108 (2001-11-01), Adefris et al.
patent: 6319420 (2001-11-01), Dow
patent: 6322422 (2001-11-01), Satou
patent: 6328642 (2001-12-01), Pant et al.
patent: 6328872 (2001-12-01), Talieh et al.
patent: 6331135 (2001-12-01), Sabde et al.
patent: 6368184 (2002-04-01), Beckage
patent: 6368190 (2002-04-01), Easter et al.
patent: 6372001 (2002-04-01), Omar et al.
patent: 6379223 (2002-04-01), Sun et al.
patent: 6381169 (2002-04-01), Bocian et al.
patent: 6383066 (2002-05-01), Chen et al.
patent: 6386956 (2002-05-01), Sato et al.
patent: 6391166 (2002-05-01), Wang
patent: 6395152 (2002-05-01), Wang
patent: 6402591 (2002-06-01), Thornton
patent: 6402925 (2002-06-01), Talieh
patent: 6406363 (2002-06-01), Xu et al.
patent: 6409904 (2002-06-01), Uzoh et al.
patent: 6413388 (2002-07-01), Uzoh et al.
patent: 6428394 (2002-08-01), Mooring et al.
patent: 64
Chang Shou-Sung
Chen Liang-Yuh
Duboust Alain
Olgado Donald J. K.
Tsai Stan D.
Applied Materials Inc.
Patterson & Sheridan LLP
Thomas David B
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