Inductor devices – Windings – Having conductor of particular shape
Reexamination Certificate
2005-12-30
2010-12-14
Enad, Elvin G (Department: 2832)
Inductor devices
Windings
Having conductor of particular shape
C438S238000, C438S623000, C438S706000
Reexamination Certificate
active
07852189
ABSTRACT:
A spiral inductor is disposed above a substrate that includes two different materials. A dielectric film is the first material that provides structural integrity for the substrate. A second dielectric is the second material that provides a low dielectric-constant (low-K) material closest to the spiral inductor coil. A process of forming the spiral inductor includes patterning the substrate to allow a recess as a receptacle for the second dielectric, followed by forming the spiral inductor mostly above the second dielectric.
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He Jiangqi
Sankman Robert L.
Xu BaoShu
Zeng Xiang Yin
Baisa Joselito
Enad Elvin G
Greaves John N.
Intel Corporation
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