Output control method for excimer laser

Details Output control method for excimer laser Output control method for excimer laser

1996-06-04

1998-05-26

Scott, Jr., Leon

Coherent light generators

Particular active media

Gas

372 25, 355 62, 355 53, H01S 322

Patent

active

057578389

ABSTRACT:
An output control method for an excimer laser includes providing plural light pulses, and changing an emission interval for the light pulses, wherein the emission interval is controlled so that an average laser output of each light pulse becomes higher than that when the emission interval is unchanged.

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