Optimized phase shift design migration

Details Optimized phase shift design migration Optimized phase shift design migration

1998-01-09

2000-07-04

Lintz, Paul R.

Computer-aided design and analysis of circuits and semiconductor

Nanotechnology related integrated circuit design

716 21, 430 4, 430 5, 430 8, G06F 760, G06F 1710, G03F 900, G03F 500

Patent

active

060832754

ABSTRACT:
A method for converting an integrated circuit design to a phase-shift complaint mask design. The method comprises the steps of locating features of the integrated circuit that violate predetermined design criteria converting error flags to physical marker shapes, modifying the located features using layout modification system technology based on a predetermined cost constraint, determining if all violations are corrected, and either changing the cost constraint to a higher cost constraint if violations still exist and repeating the process or terminating the conversion if all violations are corrected.

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Gerald Galan et al. "Phase Shifted Design Verification Routine", S/N 08/823576, Mar. 25, 1997.
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