4. Radiation imagery chemistry: process, composition, or product th
  5. Radiation modifying product or process of making
  6. Radiation mask

Lars W. Liebmann

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Alternating phase shift mask design for high performance...

Radiation imagery chemistry: process – composition – or product th – Radiation modifying product or process of making – Radiation mask
Reexamination Certificate

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Alternating phase shift mask design with optimized phase shapes

Computer-aided design and analysis of circuits and semiconductor – Nanotechnology related integrated circuit design
Reexamination Certificate

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Alternating phase shift mask design with optimized phase shapes

Radiation imagery chemistry: process – composition – or product th – Radiation modifying product or process of making – Radiation mask
Reexamination Certificate

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Asymmetric halftone biasing for sub-grid pattern adjustment

Radiation imagery chemistry: process – composition – or product th – Radiation modifying product or process of making – Radiation mask
Reexamination Certificate

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Automatic generation of phase shift masks using net coloring

Computer-aided design and analysis of circuits and semiconductor – Nanotechnology related integrated circuit design
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Profile ID: LFUS-PAI-P-187177

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