Optimized mirror design for optical direct write

Radiation imagery chemistry: process – composition – or product th – Imaging affecting physical property of radiation sensitive... – Forming nonplanar surface

Reexamination Certificate

Rate now

  [ 0.00 ] – not rated yet Voters 0   Comments 0

Details

C430S311000, C355S067000

Reexamination Certificate

active

10825342

ABSTRACT:
The present invention provides an optimized direct write lithography system using optical mirrors. That is, a maskless lithography system is provided. The maskless direct-write lithography system provided uses an array of mirrors configured to operate in a tilting mode, a piston-displacement mode, or both in combination. The controlled mirror array is used as a substitute for the traditional chrome on glass masks. In order to avoid constraining the system to forming edges of patterns aligned with the array of mirrors, gray-scale techniques are used for subpixel feature placement. The direct-writing of a pattern portion may rely on a single mirror mode or a combination of modes.

REFERENCES:
patent: 5015080 (1991-05-01), Cassarly et al.
patent: 2005/0068510 (2005-03-01), Bleeker et al.
patent: 2006/0077506 (2006-04-01), Sandstrom
Shroff et al., “Optical Analysis of Mirror Based Pattern Generation”, Emerging Lithographic Technologies VII, pp. 550-559. © 2003.

LandOfFree

Say what you really think

Search LandOfFree.com for the USA inventors and patents. Rate them and share your experience with other people.

Rating

Optimized mirror design for optical direct write does not yet have a rating. At this time, there are no reviews or comments for this patent.

If you have personal experience with Optimized mirror design for optical direct write, we encourage you to share that experience with our LandOfFree.com community. Your opinion is very important and Optimized mirror design for optical direct write will most certainly appreciate the feedback.

Rate now

     

Profile ID: LFUS-PAI-O-3799411

  Search
All data on this website is collected from public sources. Our data reflects the most accurate information available at the time of publication.