Optical thickness measuring apparatus

Details Optical thickness measuring apparatus Optical thickness measuring apparatus

1991-02-14

1991-10-15

Evans, F. L.

Optics: measuring and testing

By configuration comparison

With photosensitive film or plate

356405, G01B 1106

Patent

active

050569236

ABSTRACT:
An optical thickness measuring apparatus comprises a light source, a spectral device which separates light produced by the light source into its spectral components, and a photodetector for detecting the light which has been separated by the spectral device into its spectral components and which has been scatter-reflected by a material being subjected to thickness measurement, said photodetector receiving only scatter-reflected light. An operation processing device calculates either one of variables a* or b* of an L*a*b* colorimetric system or either one of variable u* or v* of an L*u*v* colorimetric system on the basis of information about the light which has been scatter-reflected by the material. The information is received from the photodetector. A thickness calculating device calculates the thickness of the material from the value of the variable calculated by the operation processing device.

REFERENCES:
patent: 4785336 (1988-11-01), McComb et al.

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