Photocopying – Projection printing and copying cameras – Illumination systems or details
Reexamination Certificate
2006-11-21
2006-11-21
Kim, Peter B. (Department: 2851)
Photocopying
Projection printing and copying cameras
Illumination systems or details
C355S053000, C355S055000
Reexamination Certificate
active
07139064
ABSTRACT:
In an optical system for forming a photoresist pattern on a substrate, an optical element such as a holographic optical element and an aperture plate provides an off-axis illumination beam having a hexapole. The photoresist pattern is formed to form structures such as contact pads, and includes first holes and second holes repeatedly arranged on the substrate. The hexapole includes four first poles symmetrically disposed with respect to an x-axis and a y-axis, and two second poles disposed in the x-axis so as to be symmetric with respect to the y-axis. The off-axis illumination beam may improve a resolution of the photoresist pattern and a depth of focus (DOF) of a light beam to be projected onto the substrate.
REFERENCES:
patent: 2004/0174512 (2004-09-01), Toyoda et al.
patent: 2004/0207829 (2004-10-01), Hansen et al.
patent: 000025202 (2000-05-01), None
Hwang Chan
Kang Young-Seog
Nam Dong-Seok
F. Chau & Associates LLC
Kim Peter B.
Samsung Electronics Co,. Ltd.
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