Optical system for measuring and inspecting partially transparen

Details Optical system for measuring and inspecting partially transparen Optical system for measuring and inspecting partially transparen

1998-09-04

2000-05-02

Kim, Robert H.

Optics: measuring and testing

By configuration comparison

With photosensitive film or plate

356357, G01B 1106

Patent

active

060579242

ABSTRACT:
Techniques and systems for obtaining the thickness map of a partially transparent substrate in a nondestructive optical fashion. The thickness is determined by comparing the amount of absorption by the substrate to a calibrated amount obtained from a substrate standard with a known thickness that is formed of the same material. Digital signal processing operations are performed to reduce noise and to improve resolution of the thickness map.

REFERENCES:
patent: 5403433 (1995-04-01), Morrison et al.

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