Optical method for detecting errors in shape

Details Optical method for detecting errors in shape Optical method for detecting errors in shape

1985-03-19

1987-04-14

McGraw, Vincent P.

Optics: measuring and testing

By configuration comparison

With comparison to master, desired shape, or reference voltage

356237, 356445, G01N 2188

Patent

active

046573968

ABSTRACT:
A method for optically detecting error in shape wherein a laser irradiates with a large angle of incidence the surface of an object to be inspected for its shape and the light wavefront of its positive reflected light from the surface is converted by using a special optical element into a light wavefront that is easily converged, the converted light wavefront is converged and the state of the convergence is detected by a photoelectric detector array, and output signals from the photoelectric detector array are processed to detect and measure the shape error of the surface of the object.

REFERENCES:
patent: 3748048 (1973-07-01), Upatnieks et al.
patent: 4053228 (1977-10-01), Schiller
patent: 4215939 (1980-08-01), Miller et al.
patent: 4412746 (1983-11-01), Yokouchi
patent: 4563095 (1986-01-01), Puffer

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