Optics: measuring and testing – Of light reflection
Reexamination Certificate
2006-05-16
2006-05-16
Stafira, Michael P. (Department: 2877)
Optics: measuring and testing
Of light reflection
C356S448000
Reexamination Certificate
active
07046363
ABSTRACT:
An apparatus and method for measuring feature sizes having form birefringence. The method includes providing a surface having surface features thereon; radiating the surface features with light having a first wavelength and a first polarization; measuring a reflected polarization of light having the first wavelength reflected from the surface features; rotating the surface features by rotating the surface to measure the reflected polarization of the reflected light having the first wavelength at least one new rotated position; radiating the surface features with light having a second wavelength and the first polarization; measuring a reflected polarization of light having the second wavelength reflected from the surface features; rotating the surface features by rotating the surface to measure the reflected polarization of the reflected light having the second wavelength at least one new rotated position; and correlating the reflected polarization from the light having the first and second polarizations to surface feature sizes.
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Genz Oliver
Mantz Ulrich
Michaelis Alexander
Infineon - Technologies AG
Slater & Matsil L.L.P.
Stafira Michael P.
Valentin, II Juan D.
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