Optical element unit for exposure processes

Details Optical element unit for exposure processes Optical element unit for exposure processes

2008-01-15

2009-06-09

Rutledge, D. (Department: 2851)

Photocopying

Projection printing and copying cameras

Illumination systems or details

C355S071000, C378S034000

Reexamination Certificate

active

07545483

ABSTRACT:
An optical element unit is provided comprising an optical element group; a housing receiving said optical element group and having an inner housing part and an exit end; and a purge unit connected to said housing and providing a purge medium to said inner housing part. The optical element group comprises an ultimate optical element. The ultimate optical element is located at the exit end of housing and separates the inner housing part from an environment external to the housing. The ultimate optical element and the housing define a sealing gap. The purge unit provides purge medium to the sealing gap to prevent intrusion of contaminants into the inner housing part.

REFERENCES:
patent: 2002/0027725 (2002-03-01), Schletterer
patent: 1 339 099 (2003-08-01), None
patent: WO 02/065183 (2002-08-01), None
International Search Report based on PCT/EP2005/003875 dated May 12, 2006.
Written Opinion based on PCT/EP2005/003875 dated May 12, 2006.

Affiliated with

Also associated with

Rating

Optical element unit for exposure processes does not yet have a rating. At this time, there are no reviews or comments for this patent.

If you have personal experience with Optical element unit for exposure processes, we encourage you to share that experience with our LandOfFree.com community. Your opinion is very important and Optical element unit for exposure processes will most certainly appreciate the feedback.

Rate now

Comments { 0 }

Profile ID: LFUS-PAI-O-4148271