Optical device and inspection module

Optics: measuring and testing – By configuration comparison – With comparison to master – desired shape – or reference voltage

Reexamination Certificate

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C356S237200, C250S559080

Reexamination Certificate

active

11057590

ABSTRACT:
Optical device for representing a central image (10) of an object (1) and at least one lateral image (11, 12, 13, 14) of the same object (1), with the length of the real optical path of said central image (10) being different from the length of the real optical path of said at least one lateral image (11, 12, 13, 14) and the length of the apparent optical path of said central image (10) being equal to the length of the apparent optical path of said at least one lateral image (11, 12, 13, 14), and module for the optical inspection of objects comprising such an optical device and an optical system (7) allowing a central image (10) of the object (1) and at least one lateral image (11, 12, 13, 14) of this same object (1) to be captured simultaneously. The apparent optical paths of the central image (10) and of the lateral image (11, 12, 13, 14) being identical, these two images can be captured and correctly focussed simultaneously by a same viewing system (7).

REFERENCES:
patent: 5909285 (1999-06-01), Beaty et al.
patent: 6242756 (2001-06-01), Toh et al.
patent: 6243164 (2001-06-01), Baldwin et al.
patent: 6307210 (2001-10-01), Suzuki et al.
patent: 6445518 (2002-09-01), Lee
patent: 6567161 (2003-05-01), Lee
patent: 6573987 (2003-06-01), Shires
patent: 6813016 (2004-11-01), Quist
patent: 1 139 090 (2001-10-01), None
patent: WO 02/17357 (2002-02-01), None
patent: WO 02/44651 (2002-06-01), None
patent: WO 03/032252 (2003-04-01), None

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