Optics: measuring and testing – Inspection of flaws or impurities – Surface condition
Reexamination Certificate
2008-11-21
2010-06-29
Toatley, Jr., Gregory J (Department: 2877)
Optics: measuring and testing
Inspection of flaws or impurities
Surface condition
C356S237100
Reexamination Certificate
active
07746461
ABSTRACT:
A laser beam oscillated from a laser source is folded in its path by first and second plane mirrors and enters a beam expander. The surface of each plane mirror is deteriorated with illumination by the laser beam and the reflectance is reduced. To avoid a light quantity of the laser beam entering the beam expander from being reduced below a reference value, when the laser beam is illuminated over a certain time, a position on each of the first and second plane mirrors at which the laser beam is illuminated is changed by a structure for rotating and/or translating a reflecting surface of each plane mirror on a plane, which includes the plane mirror, while an optical axis is kept same. Thus, the useful life of each plane mirror can be prolonged without displacing the optical axis.
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patent: 2005/0270522 (2005-12-01), Miyakawa et al.
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Aizawa Noriyuki
Kawakami Hiroyuki
Miyazaki Yusuke
Takahashi Kazuo
Tanaka Shingo
Hitachi High-Technologies Corporation
McDermott Will & Emery LLP
Toatley Jr. Gregory J
Ton Tri T
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