Optical defect inspection apparatus

Details Optical defect inspection apparatus Optical defect inspection apparatus

2008-11-21

2010-06-29

Toatley, Jr., Gregory J (Department: 2877)

Optics: measuring and testing

Inspection of flaws or impurities

Surface condition

C356S237100

Reexamination Certificate

active

07746461

ABSTRACT:
A laser beam oscillated from a laser source is folded in its path by first and second plane mirrors and enters a beam expander. The surface of each plane mirror is deteriorated with illumination by the laser beam and the reflectance is reduced. To avoid a light quantity of the laser beam entering the beam expander from being reduced below a reference value, when the laser beam is illuminated over a certain time, a position on each of the first and second plane mirrors at which the laser beam is illuminated is changed by a structure for rotating and/or translating a reflecting surface of each plane mirror on a plane, which includes the plane mirror, while an optical axis is kept same. Thus, the useful life of each plane mirror can be prolonged without displacing the optical axis.

REFERENCES:
patent: 7292341 (2007-11-01), Brill et al.
patent: 2004/0008341 (2004-01-01), Iizuka et al.
patent: 2005/0270522 (2005-12-01), Miyakawa et al.
patent: 2006/0044556 (2006-03-01), Kawano
patent: 7-235579 (1995-09-01), None
patent: 2004-45111 (2004-02-01), None
patent: 2005-156537 (2005-06-01), None

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