Optical attenuator device, radiation system and lithographic...

Details Optical attenuator device, radiation system and lithographic... Optical attenuator device, radiation system and lithographic...

2006-04-18

2006-04-18

Rutledge, D. (Department: 2851)

Photocopying

Projection printing and copying cameras

With temperature or foreign particle control

C355S053000, C355S067000, C355S069000, C355S071000

Reexamination Certificate

active

07030958

ABSTRACT:
An optical attenuator device operates to remove a part of a beam of radiation having a higher than average intensity using at least one optical attenuator element. The device has application in a radiation system, and/or a lithographic apparatus, in particular a scanning lithographic apparatus, wherein the optical attenuator element(s) are provided in a central part of the beam, for example perpendicularly to a scanning direction.

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patent: 6404499 (2002-06-01), Stoeldraijer et al.
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patent: 2003/0063266 (2003-04-01), Leenders et al.
patent: 0 952 491 (1999-10-01), None
patent: 0 952 491 (1999-10-01), None
patent: 1 349 009 (2003-10-01), None
patent: 1 349 009 (2003-10-01), None
European Search Report for Application No.: EP 04 07 8467, completed Jun. 3, 2005.

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