Omega-type electron energy filter

Details Omega-type electron energy filter Omega-type electron energy filter

1986-09-12

1988-04-26

Anderson, Bruce C.

Radiant energy

With charged particle beam deflection or focussing

Magnetic lens

250356R, H01J 314, G21K 108

Patent

active

047407042

ABSTRACT:
The invention is directed to an image forming omega filter having pole pieces with straight edges which has good local resolution and very good energy resolution. The omega filter includes four deflection regions, with deflection angles greater than 90.degree..

REFERENCES:
Optik, Plies et al., 46, No. 1, Sep. 1976, pp. 75-92.
"Adaptation of a Magnetic Filtering Device on a One Megavolt Electron Microscope", Zanchi et al., Optik, 43, Nov. 1975, No. 5, pp. 455-501.

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