Observation method and apparatus for removing an oxidation layer

Details Observation method and apparatus for removing an oxidation layer Observation method and apparatus for removing an oxidation layer

1994-06-10

1996-02-27

Berman, Jack I.

Radiant energy

Inspection of solids or liquids by charged particles

Positive ion probe or microscope type

250307, H01J 37252, G01N 23225

Patent

active

054951100

ABSTRACT:
The present invention is intended to form a satisfactory SIM image having high contrast without requiring comparatively high current density and high vacuum, and to enable satisfactory observation of grains in a high resolution at a reduced cost. An object area on a sample is divided virtually into a plurality of small areas, the small areas are irradiated sequentially in a time series mode with a surface processing beam and a data acquisition beam, the irradiation of each small area is executed, secondary signals produced by the sample when the sample is irradiated with the data acquisition beam, and an image of the object area on the sample is formed on the basis of the detected secondary signals.

REFERENCES:
patent: 4933565 (1990-06-01), Yamaguchi et al.

Affiliated with

Also associated with

Rating

Observation method and apparatus for removing an oxidation layer does not yet have a rating. At this time, there are no reviews or comments for this patent.

If you have personal experience with Observation method and apparatus for removing an oxidation layer, we encourage you to share that experience with our LandOfFree.com community. Your opinion is very important and Observation method and apparatus for removing an oxidation layer will most certainly appreciate the feedback.

Rate now

Comments { 0 }

Profile ID: LFUS-PAI-O-1680897