4. Radiant energy
  5. Inspection of solids or liquids by charged particles
  6. Electron probe type

Hidekazu Takekoshi

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Apparatus and method for charged-particle beam writing

Radiant energy – Irradiation of objects or material – Irradiation of semiconductor devices
Reexamination Certificate

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Non-magnetic robotic manipulators for moving objects...

Radiant energy – Irradiation of objects or material – Irradiation of semiconductor devices
Reexamination Certificate

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Object observing apparatus and method for adjusting the same

Radiant energy – Inspection of solids or liquids by charged particles – Electron probe type
Patent

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Profile ID: LFUS-PAI-P-1217438

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