Nonvolatile semiconductor memory having boosting lines self-alig

Active solid-state devices (e.g. – transistors – solid-state diode – Field effect device – Having insulated electrode

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257316, 257319, 257320, H01L 29788

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active

059905140

ABSTRACT:
A nonvolatile semiconductor memory device includes a plurality of floating gate type memory cell transistors having control gates. Word lines are integrally formed with the control gates, and boosting lines are self-aligned with the word lines. During programming, a first voltage is applied to a selected word line, and then a second voltage is applied to the boosting line over the selected word line. The voltage on the selected word line is then increased by capacitive coupling of the second voltage thereon, thereby programming at least one selected memory cell transistor. Therefore, a voltage lower than a program voltage is used on a selected word line, thereby reducing chip area and enhancing programming speed.

REFERENCES:
patent: 5859454 (1999-01-01), Choi et al.
patent: 5877980 (1999-03-01), Mang et al.
Choi, J.D., et al. A Novel Booster Plate Technology in High Density NAND Flash Memories for Voltage Scaling-Down and Zero Program Disturbance, 1996 Symposium on VLSI Technology, Digest of Technical Papers, Jun. 1996, pp.238-239.

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