Nonvolatile semiconductor memory and a fabrication method...

Details Nonvolatile semiconductor memory and a fabrication method... Nonvolatile semiconductor memory and a fabrication method...

2006-01-23

2008-07-01

Vu, David (Department: 2818)

Semiconductor device manufacturing: process

Making field effect device having pair of active regions...

Having insulated gate

C257S316000

Reexamination Certificate

active

07393747

ABSTRACT:
A nonvolatile semiconductor memory includes a plurality of memory cell transistors, having floating gates, control gates, and inter-gate insulating films each arranged between corresponding floating gate and corresponding control gate, respectively, and deployed along a column direction; and device isolation regions deployed at a constant pitch along a row direction making a striped pattern along the column direction. The control gates are continuously deployed along the row direction, and the inter-gate insulating films are in series along the column direction and separated from each other at a constant pitch along the row direction.

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Korean Office Action (w/English Translation).

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