Nonvolatile semiconductor memory and a fabrication method...

Details Nonvolatile semiconductor memory and a fabrication method... Nonvolatile semiconductor memory and a fabrication method...

2011-02-08

2011-02-08

Phung, Anh (Department: 2824)

Semiconductor device manufacturing: process

Making field effect device having pair of active regions...

Having insulated gate

C257SE21179, C257SE21422, C257SE21680, C438S266000

Reexamination Certificate

active

07883964

ABSTRACT:
A nonvolatile semiconductor memory includes: a device region and a device isolating region, which have a pattern with a striped form that extends in a first direction, and are alternately and sequentially disposed at a first pitch in a second direction that is perpendicular to the first direction; and a contact made of a first conductive material, which is connected to the device region and disposed at the first pitch in the second direction. On a cross section of the second direction, the bottom width of the contact is longer than the top width of the contact, and the bottom width is longer than the width of the device region.

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