Nondestructive optical techniques for simultaneously measuring o

Details Nondestructive optical techniques for simultaneously measuring o Nondestructive optical techniques for simultaneously measuring o

1999-03-08

1999-12-07

Kim, Robert H.

Optics: measuring and testing

By configuration comparison

With photosensitive film or plate

356371, 356359, 356357, G01B 1106

Patent

active

059992670

ABSTRACT:
An optical technique (apparatus and method based on the use of power spectral density analysis of spectroscopic multiple angle reflection and transmission data is disclosed. The apparatus and methods measure optical constants (n, k) and thicknesses of single and multilayer films. The apparatus and method provide for index determination with high accuracy (0.00001).

REFERENCES:
patent: 4141780 (1979-02-01), Klienbnecht et al.
patent: 4355903 (1982-10-01), Sandercock
patent: 5341211 (1994-08-01), Printzhausen et al.

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