Semiconductor device manufacturing: process – Making field effect device having pair of active regions... – Having insulated gate
Reexamination Certificate
2006-03-28
2006-03-28
Tran, Mai-Huong (Department: 2818)
Semiconductor device manufacturing: process
Making field effect device having pair of active regions...
Having insulated gate
C438S257000, C438S258000, C438S263000, C438S266000, C438S201000, C438S211000, C438S594000, C257S239000, C257S261000, C257S314000, C257S323000, C257S315000, C257S316000, C257S317000
Reexamination Certificate
active
07018898
ABSTRACT:
The invention relates to a nonvolatile two-transistor semiconductor memory cell and an associated fabrication method, source and drain regions (2) for a selection transistor (AT) and a memory transistor (ST) being formed in a substrate (1). The memory transistor (ST) has a first insulation layer (3), a charge storage layer (4), a second insulation layer (5) and a memory transistor control layer (6), while the selection transistor (AT) has a first insulation layer (3′) and a selection transistor control layer (4*). By using different materials for the charge storage layer (4) and the selection transistor control layer (4*), it is possible to significantly improve the charge retention properties of the memory cell by adapting the substrate doping with electrical properties remaining the same.
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Schuler Franz
Tempel Georg
Brinks Hofer Gilson & Lione
Infineon - Technologies AG
Tran Mai-Huong
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