Semiconductor device manufacturing: process – Making field effect device having pair of active regions... – Having insulated gate
Reexamination Certificate
2007-09-18
2007-09-18
Le, Dung A. (Department: 2818)
Semiconductor device manufacturing: process
Making field effect device having pair of active regions...
Having insulated gate
C438S258000, C438S593000
Reexamination Certificate
active
11223690
ABSTRACT:
A method of fabricating a non-volatile memory is provided. In the fabricating method, a plurality of stack gate structures is formed on a substrate and a plurality of doped regions is formed in the substrate beside the stack gate structures. Then, a plurality of spacers is formed on the sidewalls of the stack gate structures. After that, a plurality of conductive pad layers is formed on the exposed doped regions. By forming the conductive pad layers, the resistance of the doped region in each memory cell can be reduced.
REFERENCES:
patent: 2003/0143790 (2003-07-01), Wu
patent: 2005/0085029 (2005-04-01), Ding
patent: 2006/0160343 (2006-07-01), Chong et al.
Chen Ming-Shang
Han Tzung-Ting
Weng Meng-Hsuan
J.C. Patents
Le Dung A.
MACRONIX International Co. Ltd.
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