Non-volatile memory cell and fabricating method thereof and...

Semiconductor device manufacturing: process – Making field effect device having pair of active regions... – Having insulated gate

Reexamination Certificate

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C438S258000, C438S593000

Reexamination Certificate

active

11223690

ABSTRACT:
A method of fabricating a non-volatile memory is provided. In the fabricating method, a plurality of stack gate structures is formed on a substrate and a plurality of doped regions is formed in the substrate beside the stack gate structures. Then, a plurality of spacers is formed on the sidewalls of the stack gate structures. After that, a plurality of conductive pad layers is formed on the exposed doped regions. By forming the conductive pad layers, the resistance of the doped region in each memory cell can be reduced.

REFERENCES:
patent: 2003/0143790 (2003-07-01), Wu
patent: 2005/0085029 (2005-04-01), Ding
patent: 2006/0160343 (2006-07-01), Chong et al.

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