Measuring and testing – Surface and cutting edge testing – Roughness
Reexamination Certificate
2011-06-21
2011-06-21
Raevis, Robert R (Department: 2856)
Measuring and testing
Surface and cutting edge testing
Roughness
Reexamination Certificate
active
07963153
ABSTRACT:
A method, a system and a computer readable medium for dynamic mode AFM amplitude versus distance curve acquisition. In an embodiment, a constant force feedback mechanism is enabled prior to the first time an AFM probe tip contacts a sample. The feedback mechanism setpoint is iteratively reduced while at least phase and amplitude of the probe tip are recorded as a function of the relative z-height of a cantilever coupled to the probe tip. The feedback mechanism setpoint may be repeatedly swept between upper and lower bounds to average out drift between the cantilever and sample. Upon detecting a threshold, an absolute tip-to-sample distance is determined and correlated to the relative z-heights. The amplitude and phase data recorded prior to tip-sample contact is then determined as a function of absolute tip-to-sample distance.
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Liu Biao
Uritsky Yuri S.
Wang Chikuang Charles
Applied Materials Inc.
Blakely & Sokoloff, Taylor & Zafman
Raevis Robert R
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