Radiant energy – Inspection of solids or liquids by charged particles – Positive ion probe or microscope type
Patent
1992-06-12
1993-01-12
Anderson, Bruce C.
Radiant energy
Inspection of solids or liquids by charged particles
Positive ion probe or microscope type
250307, 250423P, 324158R, 324158P, 324 713, H01J 3700, G01R 3128
Patent
active
051792796
ABSTRACT:
A method and apparatus for establishing a non-contact signal pathway to conductive surfaces of a circuit includes a laser beam generator and an optical system for focussing a laser beam from the beam generator onto a plasma forming foil. The foil is positioned near the conductive surface so that the plasma touches the foil at a spot. The signal pathway is thus established between the foil and the conductive surface through the plasma. Signals can be applied to and read from the conductive surface through the pathway.
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patent: 5122737 (1992-06-01), Clauberg
Block Robert C.
Millard Don L.
Anderson Bruce C.
Rensselaer Polytechnic Institute
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