Nanometer scale probe for an atomic force microscope, and method

Details Nanometer scale probe for an atomic force microscope, and method Nanometer scale probe for an atomic force microscope, and method

1991-10-03

1992-12-15

Anderson, Bruce C.

Radiant energy

Inspection of solids or liquids by charged particles

250423F, H01J 3700

Patent

active

051719924

ABSTRACT:
Methods are described for producing a needle probe tip having prescribed magnetic properties for a scanning magnetic force microscope (MFM) on a substrate positioned in an evacuated environment. A substantially rigid, nanometer-scale needle-like structure is produced by selective decomposition of a volatile organic compound by a highly focussed electron beam. Processing steps are described to obtain prescribed magnetic properties of such a needle probe structure; in particular, the fabrication of a single magnetic domain, with hard or soft magnetic properties at the distal end of the needle structure. Three dimensional probe tips are also achieved. These magnetic sensing probes allow magnetic imaging at the nanometer-scale level.

REFERENCES:
patent: 4382186 (1983-05-01), Denholm et al.
patent: 4605566 (1986-08-01), Matsui et al.
patent: 4670291 (1987-06-01), Mori et al.
patent: 4724318 (1988-02-01), Binnig
patent: 4939363 (1990-07-01), Bando et al.
patent: 4943719 (1990-07-01), Akamine et al.
patent: 4943720 (1990-07-01), Jones
patent: 5072116 (1991-12-01), Kawada et al.
Dowben et al., "Deposition of Thin Metal and Metal Silicide Films from the Decomposition of Organometallic Compounds", Materials Science and Engineering, vol. b(2), 1989, pp. 297-323.
Stauf et al., "Patterned photoassisted organometallic deposition of iron, nickel and palladium on silicon", Thin Solid Films, 156 (1988) L31-L36.
Lee et al., "Direct electron-beam patterning for nanolithography", J. Vac. Sci. Technol. 87(6), Nov./Dec. 1989, pp. 1941-1946.
Albrecht et al., "Microfabrication of cantilever styll for the atomic force microscope", J. Vac. Sci. Technol. A8(4) Jul./Aug. 1990, pp. 3386-3396.
Kuptsis et al., "Production of Carbon and Metallic Films", IBM Technical Disclosure Bulletin, vol. 13, No. 9, Feb., 1971, pp. 2497-2498.
Hans-Werner Fink, "Mono-atomic tips for scanning tunnelling microscopy", IBM J. Res. Develop., vol. 30, No. 5, Sep. 1986.
C. Schneiker et al., "Scanning tunnelling engineering", Journal of Microscopy, vol. 152, Pt. 2, Nov. 1988, pp. 585-596.
D. K. Biegelsen et al., Appl. Phys. Lett. 50 (11) Mar. 1987, "Ion milled tips for scanning tunneling microscopy", pp. 696-698.
Inga Holl Musselman and Phillip E. Russell, "Platinum/iridium tips with controlled geometry for scanning tunneling microscopy", J. Vac. Sci. Technol. A, vol. 8, No. 4, Jul./Aug. 1990, pp. 3558-3562.
Nyyssonen, D., "Microprobe-Based CD Measurement Tool", IBM Technical Disclosure Bulletin, vol. 32, No. 7, Dec. 1989, p. 168.

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