4. Measuring and testing
  5. Speed, velocity, or acceleration
  6. Acceleration determination utilizing inertial element

Scott G. Adams

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Boundary isolation for microelectromechanical devices

Active solid-state devices (e.g. – transistors – solid-state diode – Incoherent light emitter structure – With reflector – opaque mask – or optical element integral...
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Capacitance based tunable micromechanical resonators

Wave transmission lines and networks – Coupling networks – Electromechanical filter
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Electrically decoupled silicon gyroscope

Measuring and testing – Speed – velocity – or acceleration – Angular rate using gyroscopic or coriolis effect
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Insulating micro-structure and method of manufacturing same

Semiconductor device manufacturing: process – Formation of electrically isolated lateral semiconductive... – Grooved and refilled with deposited dielectric material
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Integrated large area microstructures and micromechanical...

Semiconductor device manufacturing: process – Making device or circuit responsive to nonelectrical signal – Physical stress responsive
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Profile ID: LFUS-PAI-P-135684

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