Multilayer retaining ring for chemical mechanical polishing

Details Multilayer retaining ring for chemical mechanical polishing Multilayer retaining ring for chemical mechanical polishing

2009-04-21

2011-10-04

Culbert, Roberts (Department: 1716)

Adhesive bonding and miscellaneous chemical manufacture

Differential fluid etching apparatus

For liquid etchant

C451S286000

Reexamination Certificate

active

08029640

ABSTRACT:
A carrier head for a chemical mechanical polishing apparatus includes a retaining ring having a flexible lower portion and a rigid upper portion.

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