Multibeam generating apparatus and electron beam drawing...

Details Multibeam generating apparatus and electron beam drawing... Multibeam generating apparatus and electron beam drawing...

2005-03-22

2005-03-22

Patel, Vip (Department: 2879)

Electric lamp and discharge devices

Cathode ray tube

Ray generating or control

C313S441000

Reexamination Certificate

active

06870310

ABSTRACT:
This invention provides a multielectron gun which generates a plurality of electron beams having uniform characteristics. A multielectron gun (2) is formed of a plurality of electron guns (2a-2c). The electron gun (2a) has, in addition to an electron source (21a), Wehnelt electrode (22a), and anode electrode (23), a shield electrode (24) between the Wehnelt electrode (22a) and anode electrode (23). The shield electrode reduces field interference among the electron guns.

REFERENCES:
patent: 4684848 (1987-08-01), Kaufman et al.
patent: 6225637 (2001-05-01), Terashima et al.

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