4. Radiant energy
  5. Inspection of solids or liquids by charged particles
  6. Electron probe type

Takeshi Haraguchi

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Charge-particle beam lithography system of blanking aperture...

Radiant energy – Irradiation of objects or material – Irradiation of semiconductor devices
Reexamination Certificate

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Electron beam exposure apparatus and electron beam...

Industrial electric heating furnaces – Electron beam furnace device
Reexamination Certificate

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Electron beam exposure system and electron lens

Radiant energy – Irradiation of objects or material – Irradiation of semiconductor devices
Reexamination Certificate

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Electron beam generating apparatus and electron beam...

Electric lamp and discharge devices: systems – Plural power supplies – Plural cathode and/or anode load device
Reexamination Certificate

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Electron gun, electron beam exposure apparatus, and exposure...

Radiant energy – Inspection of solids or liquids by charged particles – Electron probe type
Reexamination Certificate

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Profile ID: LFUS-PAI-P-2284389

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