Multi-purpose electrostatic lens for an ion implanter system

Details Multi-purpose electrostatic lens for an ion implanter system Multi-purpose electrostatic lens for an ion implanter system

2006-09-29

2009-08-25

Wells, Nikita (Department: 2881)

Radiant energy

Irradiation of objects or material

Irradiation of semiconductor devices

C250S3960ML

Reexamination Certificate

active

07579605

ABSTRACT:
Multi-purpose electrostatic lens for an ion implanter. The electrostatic lens allows an ion implanter to scan, accelerate, decelerate, expand, compress, focus and parallelize an ion beam. This capability enables the ion implanter to function as either a high precision medium-current ion implanter or as a high-current ion implanter.

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